Semiconductor & Microelectronics

Daily life and future

Ultrapure water and reuse water systems are very important in semiconductor factories, which are mainly used for cleaning the production process of semiconductor components. The high-quality requirement of such water against bacteria, Chlorine and TOC, etc. is extremely important for the semiconductor production process.

UV treatment is a very effective process step in the breakdown and reduction of TOC, dechlorination and killing bacteria in the water to create ultrapure water used in microelectronics and semiconductor industries.

Semiconductor & Microelectronics

Product Applications

  • UV de-chlorination before RO
  • UV disinfection before RO and after terminal UF
  • UV TOC reduction in make up and polisher process
  • Process water
  • Water pathogen barrier
  • Waste water disinfection prior to discharge to the environment


UV in the Microelectronics industry

UV solutions specially designed for your market challenges.

- Fabrication process
- Manufacturing facility
- Wet etching process

Featured Products

TOCLine DT PH / Process water
Ensuring critical processes are protected by the reduction of Total Organic Carbon (TOC) in water is necessary for the microelectronics industry. The TOCLine helps ensure ultrapure water is delivered throughout the process.
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PureLine PQ IL / Water pathogen barrier
Used specifically at providing third party bioassayed UV disinfection for product and process waters.
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PureLine PQ IL / Waste water disinfection prior to discharge to the environment
Aimed at ensuring discharge waters meet the highest level of protection before discharge into the environment.
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Nuvonic is the innovator in sustainable UV technology for water, air and surface disinfection on a global scale. Our mission is to support nature’s purity with science by protecting people and processes from harmful contamination.

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